TetraMax Diagnosis and Laker Software on Failure Analysis For ATPG/Scan Failures

A. G. Boon, Chan Choon Kit, C. Keng, Oh Chong Khiam
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引用次数: 3

Abstract

Scan/ATPG failures have been one of the main failures contributing to low yield issues and problems in microelectronics. In this paper, the beauty of the TetraMax diagnosis together with the Laker diagnosis software which serve as a complement was discussed, as they are one of the key diagnosis tools currently in the industry to analyze the scan/ATPG failures. The concept of the scan test, the files required to run TetraMax diagnosis, the use of the generated failing nets to convert into failing paths as well as the capability of the Laker software in identifying the particular suspected defective metal, via, poly, contact, active line in the failing path will be discussed together with case studies to illustrate it. This paper served as a useful reading material to wafer fabrication that has the intention of developing such capability in resolving their ATPG/scan failure issues
TetraMax诊断和Laker软件对ATPG/Scan故障的故障分析
扫描/ATPG失效是导致微电子低良率问题的主要失效之一。本文讨论了TetraMax诊断和作为补充的lake诊断软件的优点,因为它们是目前行业中分析扫描/ATPG故障的关键诊断工具之一。扫描测试的概念,运行TetraMax诊断所需的文件,使用生成的故障网转换为故障路径,以及lake软件识别特定可疑缺陷金属,通过,聚,接触,故障路径中的活动线的能力,将与案例研究一起讨论,以说明它。本文为晶圆制造提供了有用的阅读材料,旨在开发解决其ATPG/扫描失败问题的能力
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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