Improved wafer-level VFTLP system and investigation of device turn-on effects

Abstract

We present an improved wafer-level VFTLP measurement system. This system produces pulses with sub-150 ps rise time and few distortions at the rising edge. By introducing a broadband power divider, the oscilloscope no longer limits the pulse amplitude, and arbitrarily high pulse voltages can be measured. Turn-on effects in diodes and NMOSFETs are investigated using this system.