A new method using energy release elements for evaluating bonding strength [packaging]

T. Hatsuda, R. Minamitani
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引用次数: 1

Abstract

We have developed a new method, based on the concept of energy release rate, for evaluating bonding strength. This method uses a finite element approach and places "energy release elements (EREs)" (which mathematically represent the energy release due to debonding) between the interface of two materials. The characteristic of EREs is represented by the stress-elongation relationship of the elements. This relation is defined by two parameters: maximum stress and elongation before fracture. The two parameters are determined by two measurements. By using this method, we estimated the bonding strength of photoresist patterns on Cu substrates and the debonding temperature of joints made from resin and steel. The estimated values of debonding forces and debonding temperatures closely agree with the measured ones. This close agreement shows that the new method can consistently estimate bonding strength over a wide range of shapes and load conditions.
一种利用能量释放元素评估结合强度的新方法[包装]
我们开发了一种基于能量释放率的新方法来评估键合强度。该方法采用有限元方法,并将“能量释放元件”(数学上表示由于脱粘而释放的能量)。EREs的特征表现为元件的应力延伸关系。该关系由断裂前的最大应力和伸长率两个参数定义。这两个参数由两次测量确定。利用该方法,我们估计了光刻胶图案在Cu衬底上的结合强度以及树脂和钢制成的接头的脱粘温度。解粘力和解粘温度的估计值与实测值吻合较好。这种紧密的一致性表明,新方法可以在广泛的形状和负载条件下一致地估计结合强度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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