1999 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.99CH36325)

Future perspective and scaling down roadmap for RF CMOS

Pub Date : 1999-06-17 DOI: 10.1109/VLSIC.1999.797271 E. Morifuji, H. Momose, T. Ohguro, T. Yoshitomi, H. Kimijima, Fumiyoshi Matsuoka, M. Kinugawa, Y. Katsumata, Hiroshi Iwai

Monte Carlo modeling of threshold variation due to dopant fluctuations

Pub Date : 1999-06-17 DOI: 10.1109/VLSIC.1999.797274 D. Frank, Y. Taur, M. Ieong, H.-S.P. Wong

Low-temperature metal/ON/HSG-cylinder capacitor process for high density embedded DRAMs

Pub Date : 1999-06-14 DOI: 10.1109/VLSIT.1999.799391 I. Yamamoto, I. Honma, T. Yamamoto, K. Urabe, K. Inoue, Y. Takaishi, Y. Yamada, K. Tokunaga, R. Kubota, M. Hamada, Y. Kato