Characterisation of structures grown by Movpe using x-ray diffraction

This paper describes the double and triple axis diffractometers available for characterising heteroepitaxial layer structures in the laboratory environment. The relative merits of the techniques are described.

To demonstrate the materials information available from the diffractometer data (usually referred to as rocking curves) examples are given of the analysis of layer thickness and lattice parameter values for single heteroepitaxial layers, two layer structures and multiquantum well structures. For layers with a defect density of less than 10⁵ per cm² detailed analysis of rocking curve data is carried out by comparing experimental results with simulated data.

X-ray diffraction also offers a non-destructive means of fully characterising the state of relaxation of strained layer systems.