微量合金元素钛改性Sn-Ag和Sn-Cu的系统研究

W. Chen, S. Kang, C. Kao
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Getting such a superior drop-impact performance usually compromises high temperature mechanical properties such as creep resistance. But they found SAC-Ti having enhanced drop-impact performance without sacrificing a good creep property. Improving simultaneously these two mechanical properties was regarded as an excellent achievement of SAC-Ti. Moreover, considerable suppression of the undercooling and retardation of interfacial IMCs were also reported owing to the addition of Ti to SAC. Nevertheless, V. Vuorinen and his coworkers [8] lately reported the result of a thermal aging experiment on SnAg solder modified with Ti and asserted that the minor addition of Ti cannot change the activities of components nor influence the stability of the IMC layers. This study did not support the beneficial effects of minor alloying addition of Ti in SAC of the previous report [7]. Hence, it is essential to clarify the effect of Ti-addition on Sn-rich solders by further investigation. The objectives of our present work are (a) to understand the intrinsic consequence of Ti-addition on Sn-Ag and Sn-Cu solders, (b) to observe whether Ti-addition can influence the interfacial reactions between solders and under-bump metallurgies (UBMs), and (c) to reveal the contribution of Ti-addition on any other reliability performance, such as electro-migration (EM) resistance. In this study, two Ti-added Sn-Ag and Sn-Cu solders were commercially prepared; Sn-1.0Ag-0.2Ti (wt.%) and Sn-0.7Cu-0.2Ti (wt.%) in the form of solder ingots. They were cut into small pieces and evaluated for their metallurgical properties and interfacial reactions with Cu and Ni UBMs. Pure Sn-1.0Ag (wt.%) and Sn-0.7Cu (wt.%) were also prepared in the form of solder balls as control samples. DSC (differential scanning calorimetry) analysis was used to study the melting/solidification behavior of Ti-added solders. It was confirmed that a small amount of Ti addition can effectively reduce the undercooling to a few degrees, while a large undercooling is persistent in Sn-Ag or Sn-Cu solders without Ti addition. It is worth noting that a small undercooling can lessen a possibility of non-uniform solidification among many neighboring solder joints during reflow, which is beneficial for joint integrity and reliability as well. Some solder samples were also produced in the form of small solder cylinders by the injection-molded-solder (IMS) process [9], which is known for the precursor of IBM's wafer bumping technology, C4NP. Some of the solder cylinders are then exposed at 200 °C for high temperature aging experiment. For Ti-added solders, Ti2Sn3 networks can stabilize the morphology of β-Sn by restraining their grain growth, which implies they may be good candidates for resisting EM failure and maintaining the high-temperature strength of solders. Microhardness of high temperature aged samples are measured to show the trend of hardness change as a function of aging time. The interfacial reactions between different solders and different UBM show interesting results about the effect of Ti addition on the formation of interfacial IMCs. For as-reflowed samples (240 °C, 1 min), significant retardation of interfacial Cu6Sn5 is observed when both the Sn-Ag-Ti and Sn-Cu-Ti solders reacted with Cu UBM. However, Ti addition seems not to be so effective for hindering the formation of Cu3Sn. In the case of Sn-Cu-Ti solders reacted with Ni, the interfacial IMC, (Cu, Ni)6Sn5, is also found to be impeded comparing to the case without Ti addition. When Sn-Ag-Ti solders undergo a reflow process on Ni, Ni3Sn4 forms at the interface as a layer of equilibrium IMC and Ti addition unexpectedly accelerate the formation of Ni3Sn4. The Ti concentration effect and the solid-state growth kinetic of different IMCs will also be discussed in this study. 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引用次数: 1

摘要

当高性能电子系统需要更严格的可靠性要求时,用于微电子互连(如BGA,倒装芯片甚至3D-IC)的无铅焊点的可靠性问题变得越来越重要。为了提高无铅焊点的可靠性,新型焊料的选择一直是一个重要的课题。近年来,人们对Co、Cu、Fe、Ni、Zn等少量合金元素在富锡无铅钎料中的有益作用进行了大量研究[1-6]。直到最近,Liu等人[7]才首次报道了SAC (Sn-Ag-Cu)焊料中Ti对BGA应用的有益作用,具有优越的跌落冲击性能。获得如此优异的跌落冲击性能通常会损害高温机械性能,如抗蠕变性能。但他们发现SAC-Ti在不牺牲良好蠕变性能的情况下提高了跌落冲击性能。同时提高这两种力学性能被认为是SAC-Ti的一项优异成就。此外,还报道了在SAC中加入Ti对界面IMCs过冷性和迟滞性的显著抑制。然而,V. Vuorinen和他的同事[8]最近报道了用Ti改性SnAg焊料的热老化实验结果,并断言少量添加Ti不会改变组分的活性,也不会影响IMC层的稳定性。本研究不支持之前报道的在SAC中少量添加Ti合金的有益效果[7]。因此,有必要通过进一步的研究来阐明添加钛对富锡焊料的影响。我们目前工作的目标是(a)了解添加ti对Sn-Ag和Sn-Cu焊料的内在影响,(b)观察添加ti是否会影响焊料与凹凸下冶金(ubm)之间的界面反应,以及(c)揭示添加ti对任何其他可靠性性能的贡献,例如电迁移(EM)电阻。本研究制备了两种添加ti的Sn-Ag和Sn-Cu钎料;Sn-1.0Ag-0.2Ti (wt.%)和Sn-0.7Cu-0.2Ti (wt.%)焊锡锭。它们被切成小块,并评估了它们的冶金性能和与Cu和Ni UBMs的界面反应。同时制备了纯Sn-1.0Ag (wt.%)和Sn-0.7Cu (wt.%)作为对照样品。采用DSC(差示扫描量热法)分析研究了添加ti钎料的熔化/凝固行为。结果表明,少量加入Ti可有效降低过冷度,而未加入Ti的Sn-Ag或Sn-Cu钎料过冷度较大。值得注意的是,较小的过冷度可以减少回流过程中相邻焊点之间不均匀凝固的可能性,有利于焊点的完整性和可靠性。一些焊锡样品也通过注射成型焊锡(IMS)工艺以小型焊锡瓶的形式生产[9],该工艺是IBM晶圆碰撞技术C4NP的前身。然后将部分焊料筒暴露在200℃下进行高温时效实验。对于添加ti的钎料,Ti2Sn3网络可以通过抑制其晶粒生长来稳定β-Sn的形貌,这意味着它们可能是抵抗EM破坏和保持钎料高温强度的良好候选者。测定了高温时效试样的显微硬度,显示了硬度随时效时间的变化趋势。不同钎料与不同UBM之间的界面反应显示了Ti添加量对界面IMCs形成的影响。对于回流样品(240°C, 1 min),当Sn-Ag-Ti和Sn-Cu-Ti焊料与Cu UBM反应时,观察到界面Cu6Sn5的显著阻滞。然而,Ti的加入似乎对阻碍Cu3Sn的形成没有那么有效。当Sn-Cu-Ti钎料与Ni反应时,界面IMC (Cu, Ni)6Sn5也受到阻碍。当Sn-Ag-Ti钎料在Ni上进行回流过程时,Ni3Sn4在界面处形成一层平衡IMC, Ti的加入意外地加速了Ni3Sn4的形成。本研究还将讨论钛浓度效应和不同IMCs的固态生长动力学。在未来的研究中,我们将通过在电磁应力作用下提供均匀电流密度的铜丝模型来评估添加ti对Sn-Ag和Sn-Cu焊点电迁移性能的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Systematic investigation of Sn-Ag and Sn-Cu modified by minor alloying element of titanium
Reliability issues of Pb-free solder joints used in microelectronic interconnects, such as BGA, flip-chip, or even 3D-IC, are becoming more critical recently when high performance electronic systems demand more rigorous reliability requirements. The selection of new solder materials has been an important topic in order to enhance the reliability of Pb-free solder joints. In the past few years, numerous studies have been conducted on the beneficial effects of minor alloying elements, including Co, Cu, Fe, Ni, Zn and others, into Sn-rich Pb-free solders [1-6]. Only recently have Liu et al. [7] first reported the beneficial effect of Ti in SAC (Sn-Ag-Cu) solder for BGA applications with superior drop-impact performance. Getting such a superior drop-impact performance usually compromises high temperature mechanical properties such as creep resistance. But they found SAC-Ti having enhanced drop-impact performance without sacrificing a good creep property. Improving simultaneously these two mechanical properties was regarded as an excellent achievement of SAC-Ti. Moreover, considerable suppression of the undercooling and retardation of interfacial IMCs were also reported owing to the addition of Ti to SAC. Nevertheless, V. Vuorinen and his coworkers [8] lately reported the result of a thermal aging experiment on SnAg solder modified with Ti and asserted that the minor addition of Ti cannot change the activities of components nor influence the stability of the IMC layers. This study did not support the beneficial effects of minor alloying addition of Ti in SAC of the previous report [7]. Hence, it is essential to clarify the effect of Ti-addition on Sn-rich solders by further investigation. The objectives of our present work are (a) to understand the intrinsic consequence of Ti-addition on Sn-Ag and Sn-Cu solders, (b) to observe whether Ti-addition can influence the interfacial reactions between solders and under-bump metallurgies (UBMs), and (c) to reveal the contribution of Ti-addition on any other reliability performance, such as electro-migration (EM) resistance. In this study, two Ti-added Sn-Ag and Sn-Cu solders were commercially prepared; Sn-1.0Ag-0.2Ti (wt.%) and Sn-0.7Cu-0.2Ti (wt.%) in the form of solder ingots. They were cut into small pieces and evaluated for their metallurgical properties and interfacial reactions with Cu and Ni UBMs. Pure Sn-1.0Ag (wt.%) and Sn-0.7Cu (wt.%) were also prepared in the form of solder balls as control samples. DSC (differential scanning calorimetry) analysis was used to study the melting/solidification behavior of Ti-added solders. It was confirmed that a small amount of Ti addition can effectively reduce the undercooling to a few degrees, while a large undercooling is persistent in Sn-Ag or Sn-Cu solders without Ti addition. It is worth noting that a small undercooling can lessen a possibility of non-uniform solidification among many neighboring solder joints during reflow, which is beneficial for joint integrity and reliability as well. Some solder samples were also produced in the form of small solder cylinders by the injection-molded-solder (IMS) process [9], which is known for the precursor of IBM's wafer bumping technology, C4NP. Some of the solder cylinders are then exposed at 200 °C for high temperature aging experiment. For Ti-added solders, Ti2Sn3 networks can stabilize the morphology of β-Sn by restraining their grain growth, which implies they may be good candidates for resisting EM failure and maintaining the high-temperature strength of solders. Microhardness of high temperature aged samples are measured to show the trend of hardness change as a function of aging time. The interfacial reactions between different solders and different UBM show interesting results about the effect of Ti addition on the formation of interfacial IMCs. For as-reflowed samples (240 °C, 1 min), significant retardation of interfacial Cu6Sn5 is observed when both the Sn-Ag-Ti and Sn-Cu-Ti solders reacted with Cu UBM. However, Ti addition seems not to be so effective for hindering the formation of Cu3Sn. In the case of Sn-Cu-Ti solders reacted with Ni, the interfacial IMC, (Cu, Ni)6Sn5, is also found to be impeded comparing to the case without Ti addition. When Sn-Ag-Ti solders undergo a reflow process on Ni, Ni3Sn4 forms at the interface as a layer of equilibrium IMC and Ti addition unexpectedly accelerate the formation of Ni3Sn4. The Ti concentration effect and the solid-state growth kinetic of different IMCs will also be discussed in this study. The effects of Ti-addition on electro-migration performance of Sn-Ag and Sn-Cu solder joints will be evaluated with a model joint of Cu wire samples providing a uniform current density during EM stressing in the future.
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