{"title":"高速器件用二维多层WSe2光电晶体管的电学和光电子特性分析","authors":"A. S. Bandyopadhyay, K. Jayanand, A. Kaul","doi":"10.1109/NEMS50311.2020.9265572","DOIUrl":null,"url":null,"abstract":"In this work, we fabricated back gated multilayer WSe2 phototransistor with Au/Ti as electrodes whose electrical properties were investigated over a wide range of temperature T from T = 5.4 to T = 350 K from which several electrical parameters including mobility μ and barrier height ϕms were extracted to analyze their T-dependencies. For example, the T-dependent mobility μ was characterized by a peak at ~ 250 K after which point μ decreased according to μ ~ T-0.71, attributed to phonon scattering. Additionally, ϕms was found to be 29 meV at VG = 0 V which decreased as VG increased in alignment with barrier modulation theory. Finally, optoelectronic properties of our Au/Ti/WSe2 field effect transistors (FETs) were investigated by exposing the device to a tunable laser, where the photoresponsivity R was calculated to be ~ 43 A/W at an optical power of 0.786 nW. The phototransistor also showed very short response time with τrise = 10 ms, and Tfall = 3 ms. Our work demonstrates excellent potential of WSe2 as a promising 2D semiconductor for high speed electronics and opto-electronics.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"1 1","pages":"18-21"},"PeriodicalIF":0.0000,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Electrical and Optoelectronic Properties Analysis in Two-dimensional Multilayer WSe2 Phototransistor for High Speed Device Applications\",\"authors\":\"A. S. Bandyopadhyay, K. Jayanand, A. Kaul\",\"doi\":\"10.1109/NEMS50311.2020.9265572\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, we fabricated back gated multilayer WSe2 phototransistor with Au/Ti as electrodes whose electrical properties were investigated over a wide range of temperature T from T = 5.4 to T = 350 K from which several electrical parameters including mobility μ and barrier height ϕms were extracted to analyze their T-dependencies. For example, the T-dependent mobility μ was characterized by a peak at ~ 250 K after which point μ decreased according to μ ~ T-0.71, attributed to phonon scattering. Additionally, ϕms was found to be 29 meV at VG = 0 V which decreased as VG increased in alignment with barrier modulation theory. Finally, optoelectronic properties of our Au/Ti/WSe2 field effect transistors (FETs) were investigated by exposing the device to a tunable laser, where the photoresponsivity R was calculated to be ~ 43 A/W at an optical power of 0.786 nW. The phototransistor also showed very short response time with τrise = 10 ms, and Tfall = 3 ms. Our work demonstrates excellent potential of WSe2 as a promising 2D semiconductor for high speed electronics and opto-electronics.\",\"PeriodicalId\":6787,\"journal\":{\"name\":\"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)\",\"volume\":\"1 1\",\"pages\":\"18-21\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-09-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS50311.2020.9265572\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS50311.2020.9265572","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Electrical and Optoelectronic Properties Analysis in Two-dimensional Multilayer WSe2 Phototransistor for High Speed Device Applications
In this work, we fabricated back gated multilayer WSe2 phototransistor with Au/Ti as electrodes whose electrical properties were investigated over a wide range of temperature T from T = 5.4 to T = 350 K from which several electrical parameters including mobility μ and barrier height ϕms were extracted to analyze their T-dependencies. For example, the T-dependent mobility μ was characterized by a peak at ~ 250 K after which point μ decreased according to μ ~ T-0.71, attributed to phonon scattering. Additionally, ϕms was found to be 29 meV at VG = 0 V which decreased as VG increased in alignment with barrier modulation theory. Finally, optoelectronic properties of our Au/Ti/WSe2 field effect transistors (FETs) were investigated by exposing the device to a tunable laser, where the photoresponsivity R was calculated to be ~ 43 A/W at an optical power of 0.786 nW. The phototransistor also showed very short response time with τrise = 10 ms, and Tfall = 3 ms. Our work demonstrates excellent potential of WSe2 as a promising 2D semiconductor for high speed electronics and opto-electronics.