不完美人工制品对虚拟仪器不确定度量化的影响及操作方法

G. Kok, G. Wübbeler, C. Elster
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引用次数: 1

摘要

使用虚拟仪器(VIs)来分析测量结果和计算不确定度正在增加。众所周知的例子是虚拟坐标测量机(vcmm),它经常被用于评估测量机的测量不确定度,甚至在商业上提供。VI概念最近的一个应用是由散射计的建模提出的。这些vi可用于根据实际测量数据进行测量后评估测量不确定度,或在测量之前使用一种模拟测量数据预测测量不确定度。本文的研究问题是评估这种预测的不确定度是否与基于测量数据的计算不确定度的大小相似。但事实并非如此。本文的主要观察是,由VI预测的不确定度可能对所选择的VI操作方式高度敏感。为了修正这种情况,提出了一个简单的程序,可以在进行实际测量之前使用,并且被认为在大多数情况下产生测量不确定度的保守预测。这在一个案例研究中得到了验证,该研究涉及使用三坐标测量机测量不完美球体的非球面,并通过VCMM计算不确定度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of Imperfect Artefacts and the Modus Operandi on Uncertainty Quantification Using Virtual Instruments
The usage of virtual instruments (VIs) to analyze measurements and calculate uncertainties is increasing. Well-known examples are virtual coordinate measurement machines (VCMMs) which are often used and even commercially offered to assess measurement uncertainties of CMMs. A more recent usage of the VI concept is posed by the modeling of scatterometers. These VIs can be used to assess the measurement uncertainty after the measurement has been performed based on the real measurement data or prior to the measurement to predict the measurement uncertainty using a type of simulated measurement data. The research question addressed in this paper is to assess if this predicted uncertainty will be similar in magnitude to the calculated uncertainty based on the measurement data. It turns out that this is not necessarily the case. The main observation of this paper was that the uncertainty predicted by a VI can be highly sensitive to the chosen way of operating the VI. To amend this situation, a simple procedure was proposed that can be used prior to performing the real measurement and that is believed to produce a conservative prediction of the measurement uncertainty in most cases. This was verified in a case study involving the measurement of the asphericity of an imperfect sphere using a CMM, with the uncertainty calculated by means of a VCMM.
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