碘辐照引起的晶体硅缺陷

A. Slav, A. Lepadatu, C. Palade, I. Stavarache, G. Iordache, M. Ciurea, S. Lazanu, M. R. Mitroi
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引用次数: 0

摘要

用28 MeV动能的127I6+离子辐照电阻率大于8000 Ωcm的n型p掺杂硅单晶。利用CTRIM蒙特卡罗程序模拟了离子穿过靶的过程和能量损失过程,并在扩散反应模型框架下计算了点缺陷的产生。采用无外加偏压的热刺激电流法研究了捕获现象。电流-温度曲线的建模考虑了点缺陷和应力型捕获中心,它们是由离子进入晶体产生的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Iodine irradiation induced defects in crystalline silicon
N-type P-doped silicon single crystals with resistivity higher than 8000 Ωcm were irradiated with 127I6+ ions of 28 MeV kinetic energy. The penetration of the ions through the target and the processes of energy loss were simulated using the CTRIM Monte Carlo code, and point defect production was calculated in the frame of our diffusion-reaction model. Trapping phenomena were investigated using the method of thermally stimulated currents without applied bias. The modeling of the current-temperature curves takes into consideration both point defects and stress-type trapping centers, produced by the ions stopped into the crystal.
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