多层薄膜吸光度和反射率的镀膜厚度模拟与优化

R MohanKumarT, P. Srihari, M. S. Krupashankara
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引用次数: 0

摘要

太阳能热转换系统的太阳能选择性材料和结构对光学性能的改善起着突出的作用。本文利用代码软件对Mo和Was功能层与Si3N4和Al2O3的键合层和保护层结合的多层薄膜进行了模拟。选择较好的组合进行吸收和反射厚度的优化。为了简化实验,采用田口的实验设计方法确定最佳的材料层组合。结果表明:对多层薄膜进行键合层厚度、功能层厚度和保护层厚度优化后,Al2O3-Mo-Al2O3复合膜的吸收率为50.48%,Si3N4-W-Si3N4复合膜的吸收率为74.81%。这些结果在主效应图、等高线图和曲面图上进行了讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Simulation and Optimization of Coating thickness for Absorptance and Reflectance in Multilayered Thin Films
Solar selective materials and structure of solar thermal energy conversion systems plays a prominent role for the improvement of optical properties. In the present work simulations on multi-layered thin films have been conducted using code software with Mo and Was functional layer in combination with bond layer and protective layers of Si3N4 and Al2O3. The better combination is selected for optimization on thickness for absorption and reflection. To simplify experimentation, Taguchi‟s design of experiments approach was adopted to determine the optimum material layer combination.The results indicate for multi-layered thin films that combination of Al2O3-Mo-Al2O3 has better reflectance of 50.48% and combination Si3N4-W-Si3N4 has better absorptance of 74.81% upon optimization on thickness of bond layers, functional and protective layers. These results are discussed on main effect plots, contour plots and surface plots.
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