{"title":"非正入射法测量薄膜光学常数灵敏度的理论研究","authors":"L. Ward, A. Nag","doi":"10.1088/0508-3443/18/11/317","DOIUrl":null,"url":null,"abstract":"The sensitivity studies for methods of measuring n, k and d/λ of a thin film by optical methods have been extended to cases of non-normal incidence. The results for each pair of parameters are exhibited in the form of sensitivity diagrams. The diagrams for (Tp, Ts) and (Rp, Rs) at θ = 45°, 60° and 75° show overall high sensitivity over the region 0 3, k > 3.","PeriodicalId":9350,"journal":{"name":"British Journal of Applied Physics","volume":"60 1","pages":"1629-1636"},"PeriodicalIF":0.0000,"publicationDate":"1967-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Theoretical studies of the sensitivities of non-normal incidence methods for measuring the optical constants of thin films\",\"authors\":\"L. Ward, A. Nag\",\"doi\":\"10.1088/0508-3443/18/11/317\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The sensitivity studies for methods of measuring n, k and d/λ of a thin film by optical methods have been extended to cases of non-normal incidence. The results for each pair of parameters are exhibited in the form of sensitivity diagrams. The diagrams for (Tp, Ts) and (Rp, Rs) at θ = 45°, 60° and 75° show overall high sensitivity over the region 0 3, k > 3.\",\"PeriodicalId\":9350,\"journal\":{\"name\":\"British Journal of Applied Physics\",\"volume\":\"60 1\",\"pages\":\"1629-1636\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1967-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"British Journal of Applied Physics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1088/0508-3443/18/11/317\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"British Journal of Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/0508-3443/18/11/317","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Theoretical studies of the sensitivities of non-normal incidence methods for measuring the optical constants of thin films
The sensitivity studies for methods of measuring n, k and d/λ of a thin film by optical methods have been extended to cases of non-normal incidence. The results for each pair of parameters are exhibited in the form of sensitivity diagrams. The diagrams for (Tp, Ts) and (Rp, Rs) at θ = 45°, 60° and 75° show overall high sensitivity over the region 0 3, k > 3.
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