液压微执行器两种密封技术的比较

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI:10.1109/SENSOR.2005.1496424

M. D. De Volder, J. Peirs, D. Reynaerts, J. Coosemans, R. Puers, O. Smal, B. Raucent

{"title":"液压微执行器两种密封技术的比较","authors":"M. D. De Volder, J. Peirs, D. Reynaerts, J. Coosemans, R. Puers, O. Smal, B. Raucent","doi":"10.1109/SENSOR.2005.1496424","DOIUrl":null,"url":null,"abstract":"In order to improve the power density of microactuators, recent research focuses on the applicability of fluidic power at microscale. One of the reasons that hydraulic actuators are still uncommon in micro system technology is due to the difficulty of fabricating powerful microseals. This paper presents two seal technologies that are suitable for sealing small-scale hydraulic actuators. Measurements on prototype actuators show that force densities up to 0.45 N/mm/sup 2/ (0.025 N/mm/sup 3/) and work densities up to 0.2 mJ/mm/sup 3/ can easily be achieved with the developed seal technology. These characteristics can still be improved as the maximum driving pressures of the actuators have not yet been determined.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"41 1","pages":"333-336 Vol. 1"},"PeriodicalIF":0.0000,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Comparison of two seal technologies for hydraulic microactuators\",\"authors\":\"M. D. De Volder, J. Peirs, D. Reynaerts, J. Coosemans, R. Puers, O. Smal, B. Raucent\",\"doi\":\"10.1109/SENSOR.2005.1496424\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In order to improve the power density of microactuators, recent research focuses on the applicability of fluidic power at microscale. One of the reasons that hydraulic actuators are still uncommon in micro system technology is due to the difficulty of fabricating powerful microseals. This paper presents two seal technologies that are suitable for sealing small-scale hydraulic actuators. Measurements on prototype actuators show that force densities up to 0.45 N/mm/sup 2/ (0.025 N/mm/sup 3/) and work densities up to 0.2 mJ/mm/sup 3/ can easily be achieved with the developed seal technology. These characteristics can still be improved as the maximum driving pressures of the actuators have not yet been determined.\",\"PeriodicalId\":22359,\"journal\":{\"name\":\"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.\",\"volume\":\"41 1\",\"pages\":\"333-336 Vol. 1\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-06-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2005.1496424\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2005.1496424","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

为了提高微执行器的功率密度，近年来的研究重点是流体动力在微尺度上的适用性。液压执行器在微系统技术中仍然不常见的原因之一是由于制造强大的微密封的困难。本文介绍了两种适用于小型液压执行机构密封的密封技术。对原型执行器的测量表明，采用所开发的密封技术，可以轻松实现高达0.45 N/mm/sup 2/ (0.025 N/mm/sup 3/)的力密度和高达0.2 mJ/mm/sup 3/的工作密度。由于执行器的最大驱动压力尚未确定，这些特性仍然可以得到改善。

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Comparison of two seal technologies for hydraulic microactuators

In order to improve the power density of microactuators, recent research focuses on the applicability of fluidic power at microscale. One of the reasons that hydraulic actuators are still uncommon in micro system technology is due to the difficulty of fabricating powerful microseals. This paper presents two seal technologies that are suitable for sealing small-scale hydraulic actuators. Measurements on prototype actuators show that force densities up to 0.45 N/mm/sup 2/ (0.025 N/mm/sup 3/) and work densities up to 0.2 mJ/mm/sup 3/ can easily be achieved with the developed seal technology. These characteristics can still be improved as the maximum driving pressures of the actuators have not yet been determined.

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来源期刊

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

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