采用选择性外延生长制造的静态感应晶体管内的绝缘体上无平面的寄生结构

Cristian Ravariu , Avireni Srinivasulu , Lidia Dobrescu
{"title":"采用选择性外延生长制造的静态感应晶体管内的绝缘体上无平面的寄生结构","authors":"Cristian Ravariu ,&nbsp;Avireni Srinivasulu ,&nbsp;Lidia Dobrescu","doi":"10.1016/j.ssel.2019.07.001","DOIUrl":null,"url":null,"abstract":"<div><p>Power dissipation obstacle in electronic devices is strongly related to their internal breakdown mechanism. The Static Induction Transistor optimization imposes to reach p-gate regions as deep as vertical as possible. These objectives can be achieved using Selective Epitaxial Growth technology, so that the final structure between Gate and Drain becomes Silicon On Insulator. In addition the insulator is thin enough, it allows the vertical Gate–Drain breakdown, by a parasite planar variant of the Nothing On Insulator structure. Other papers have been presented Nothing On Insulator alternative structures alone for useful or non-parasitic applications. At this movement, the Nothing On Insulator structure has another role to play. It is the main parasitic device prevailing inside the Static Induction Transistor that must be avoided. The paper presents analytical models and simulation results for the potential distribution in a Gate–Drain cross-section. A breakdown regime is established for the Static Induction Transistor, with breakdown voltages between 313 V and 430 V, based on the planar-Nothing On Insulator theory.</p></div>","PeriodicalId":101175,"journal":{"name":"Solid State Electronics Letters","volume":"1 2","pages":"Pages 45-51"},"PeriodicalIF":0.0000,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.ssel.2019.07.001","citationCount":"0","resultStr":"{\"title\":\"Planar-Nothing On Insulator parasitic structure within a static induction transistor made by selective epitaxial growth\",\"authors\":\"Cristian Ravariu ,&nbsp;Avireni Srinivasulu ,&nbsp;Lidia Dobrescu\",\"doi\":\"10.1016/j.ssel.2019.07.001\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Power dissipation obstacle in electronic devices is strongly related to their internal breakdown mechanism. The Static Induction Transistor optimization imposes to reach p-gate regions as deep as vertical as possible. These objectives can be achieved using Selective Epitaxial Growth technology, so that the final structure between Gate and Drain becomes Silicon On Insulator. In addition the insulator is thin enough, it allows the vertical Gate–Drain breakdown, by a parasite planar variant of the Nothing On Insulator structure. Other papers have been presented Nothing On Insulator alternative structures alone for useful or non-parasitic applications. At this movement, the Nothing On Insulator structure has another role to play. It is the main parasitic device prevailing inside the Static Induction Transistor that must be avoided. The paper presents analytical models and simulation results for the potential distribution in a Gate–Drain cross-section. A breakdown regime is established for the Static Induction Transistor, with breakdown voltages between 313 V and 430 V, based on the planar-Nothing On Insulator theory.</p></div>\",\"PeriodicalId\":101175,\"journal\":{\"name\":\"Solid State Electronics Letters\",\"volume\":\"1 2\",\"pages\":\"Pages 45-51\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/j.ssel.2019.07.001\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Solid State Electronics Letters\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2589208819300183\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Solid State Electronics Letters","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2589208819300183","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

电子器件的功耗障碍与其内部击穿机制密切相关。静电感应晶体管的优化要求达到p栅极区域尽可能深的垂直。这些目标可以通过选择性外延生长技术来实现,从而使栅极和漏极之间的最终结构成为绝缘体上的硅。此外,绝缘体足够薄,它允许垂直栅极-漏极击穿,由寄生的平面变体无绝缘体结构。其他论文也提出了无绝缘体替代结构单独用于有用或非寄生应用。在这场运动中,无绝缘体结构还有另一个角色要扮演。它是静电感应晶体管内部普遍存在的寄生器件,必须加以避免。本文给出了闸漏截面电势分布的解析模型和仿真结果。基于平面无绝缘体理论,建立了静电感应晶体管击穿电压在313 V和430 V之间的击穿状态。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Planar-Nothing On Insulator parasitic structure within a static induction transistor made by selective epitaxial growth

Power dissipation obstacle in electronic devices is strongly related to their internal breakdown mechanism. The Static Induction Transistor optimization imposes to reach p-gate regions as deep as vertical as possible. These objectives can be achieved using Selective Epitaxial Growth technology, so that the final structure between Gate and Drain becomes Silicon On Insulator. In addition the insulator is thin enough, it allows the vertical Gate–Drain breakdown, by a parasite planar variant of the Nothing On Insulator structure. Other papers have been presented Nothing On Insulator alternative structures alone for useful or non-parasitic applications. At this movement, the Nothing On Insulator structure has another role to play. It is the main parasitic device prevailing inside the Static Induction Transistor that must be avoided. The paper presents analytical models and simulation results for the potential distribution in a Gate–Drain cross-section. A breakdown regime is established for the Static Induction Transistor, with breakdown voltages between 313 V and 430 V, based on the planar-Nothing On Insulator theory.

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