Morphology control of LiCoO2 thin film prepared by pulsed laser deposition

LiCoO2 thin film samples have been prepared by pulsed laser deposition under different deposition conditions. A series of tests have been done to investigate the relationship between the film quality and the deposition conditions. The results from XRD show that the LiCoO2 films deposited by PLD thermodynamically tend to form (003) preferred orientation. But the films grown at high repetition rate (35Hz) and low oxygen pressure (1Pa) show a random orientation. SEM and AFM images reveal that the size and uniformity of LiCoO2 crystalline grains is directly depends on the deposition temperature and repetition rate. Therefore, by adjusting the deposition parameters, to achieve the purpose of LiCoO2 thin film morphology control is feasible.