一种用于微纳牛顿力测量的新型电磁力法

2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2017-08-01 DOI:10.1109/3M-NANO.2017.8286287

Chongkai Zhou, Yanling Tian, Fujun Wang, Zhiyong Guo, Dawei Zhang

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引用次数: 0

摘要

基于电磁作动器，设计了一种新型的微纳牛顿力测量系统，并对悬挂机构的变形进行了测量。该系统主要包括电磁执行机构、柔性悬架机构和位移传感器。介绍了一种悬架机构零位测量方法。在ANSYS Maxwell软件中对电磁力进行理论建模和仿真，优化磁体的位置。然后，通过有限元分析对悬架机构进行了仿真。实验结果表明，所研制的系统电流分辨率为1mA，电磁力转化率为400μN/mA，刚度27.5N/m。

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A novel electromagnetic force method for micro/nano newton force measurement

Based on the electromagnetic actuator, a novel mechanical system is developed for the measurement of micro/nano newton force, as well as the deformation of the suspension mechanism. The system mainly includes the electromagnetic actuator, flexible suspension mechanism and displacement sensor. A null position measurement method for the suspension mechanism is introduced. The electromagnetic force is theoretically modeled and simulated in ANSYS Maxwell software to optimize the position of the magnet. And then, the suspension mechanism is simulated by Finite Element Analysis (FEA). According to the experimental results, the developed system has a current resolution 1mA, electromagnetic force conversion rate 400μN/mA, the stiffness 27.5N/m.

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2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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