一种用于测量mosfet阈值电压方差的新型测试结构

2013 IEEE International Test Conference (ITC) Pub Date : 2013-11-04 DOI:10.1109/TEST.2013.6651878

Takahiro J. Yamaguchi, James S. Tandon, S. Komatsu, K. Asada

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引用次数: 8

摘要

介绍了一种利用随机比较器组的阈值电压变化监测电路。它占地面积小，只需要直流输入刺激电压，并进行数字直流测量。传统的方法需要测量环形振荡器频率的变化。我们的方法避免了交流测量的需要，并通过将随机特性纳入电路来加速数据的积累。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A novel test structure for measuring the threshold voltage variance in MOSFETs

A new threshold voltage variation monitoring circuit is introduced which utilizes a stochastic comparator group. It occupies minimal area, only requires a DC input stimulus voltage, and performs digital DC measurement. Traditional methods have required the measurement of the variation in a ring oscillator frequency. Our method circumvents the need for AC measurements, and accelerates the accumulation of data by incorporating stochastic properties into the circuit.

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来源期刊

2013 IEEE International Test Conference (ITC)

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