X-ray diffraction studies of thin films and multilayer structures

Analytical methods for the nondestructive characterization of thin epitaxial films, multilayers and superlattices by x-ray diffraction that have been developed in the last decade are reviewed in three sections:

• 1.

  I. Description of the strain state by the strain tensor and determination of homogeneous strains and stresses by double-crystal diffractometry in Bragg case reflection;

• 2.

  II. Determination of inhomogeneous strains, such as strain gradients or periodic strain modulations, by double-crystal diffractometry in Bragg case reflection;

• 3.

  III. Characterization parallel to the surface by grazing-incidence x-ray diffraction.