H/sub 2//air self-breathing micro PEM fuel cell stacks with MEMS fabrication technology

Presented is a H/sub 2//air self-breathing miniature proton exchange membrane fuel cell (/spl mu/PEMFC) stack. MEMS fabrication technology is used to complete both the single fuel cell and the stack of six cells electrically connected in series. The single-sided self-breathing /spl mu/PEMFC stack with planar-layout configuration is realized for convenience of portable applications. In addition, the /spl mu/PEMFC stack meets the requirement of miniaturized low cost mass fabrication. The characterization results show specific power as high as 0.21W/cm/sup 3/, with which the MEMS /spl mu/PEMFC stack is promising to be applied as a new generation of miniaturized hydrogen power source.