直接激光干涉光刻在不锈钢表面的变形

2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2017-08-01 DOI:10.1109/3M-NANO.2017.8286335

Liang Cao, Qi Liu, M. Yu, Wenjun Li, Dayou Li, Zuobin Wang, Dong Li, Jiao Meng

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引用次数: 0

摘要

提出了一种利用直接激光干涉光刻技术在不锈钢表面织构设计良好、高度可控的微韧窝结构的方法。该方法的创新之处是，通过控制三束激光干涉的过程，可以直接制备微圆韧窝结构。为了降低不锈钢的摩擦系数，研究了不同暴露时间下的韧窝直径和密度的最佳值。利用UMT-TriboLab机械测试仪对15 n法向载荷下的摩擦系数进行了干滑动试验，结果表明，平均直径为4.2 μm、密度为23%的微圆凹窝结构与未处理表面相比，摩擦系数降低了约77%。

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Surface texturing on stainless steel by direct laser interference lithography

A method for the surface texturing of well-designed and high controllable micro dimple structures on stainless steel by direct laser interference lithography (DLIL) is presented. The method offers its innovation that the micro circular dimple structures can be fabricated directly by controlling the process of three-beam laser interference. Different exposure durations have been studied to achieve the optimum value of the dimple diameter and density in order to reduce the friction coefficient of stainless steel. The dry sliding test of friction coefficients were performed by mechanical tester (UMT-TriboLab) under normal loads of 15 N. The results indicate that the micro circular dimple structures with the average dimple diameter of 4.2 μm and density of 23 percent have about 77% reduction of friction coefficient compared with untreated surfaces.

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2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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