晶圆级晶片级封装的关键设计与性能建模

Y. Liu, Qiuxiao Qian, M. Ring, Jihwan Kim, D. Kinzer
{"title":"晶圆级晶片级封装的关键设计与性能建模","authors":"Y. Liu, Qiuxiao Qian, M. Ring, Jihwan Kim, D. Kinzer","doi":"10.1109/ECTC.2012.6248985","DOIUrl":null,"url":null,"abstract":"Comprehensive finite element analysis (FEA) modeling is carried out to improve the performance of critical designs of wafer level chip scale package (WLCSP). First, a design with one layer redistribution layout (RDL) copper with etched pocket in the non-covered UBM area and one layer polyimide structure (1Cu1Pi design) is investigated. Different polyimide layouts, copper thicknesses, pocket parameters and non-covered UBM diameters are studied through finite element modeling. Then, a stacked metal design with the sputtered copper UBM stacked on the RDL copper layer, with one polyimide layer between them (2Cu1Pi) for the WLCSP is examined. Parameter study of different UBM diameters with the same solder volume and different UBM diameters with the same solder joint height is conducted by the simulation. Finally the correlation and comparison of the failure mechanism between the modeling and the test are presented and discussed.","PeriodicalId":6384,"journal":{"name":"2012 IEEE 62nd Electronic Components and Technology Conference","volume":"24 1","pages":"1174-1182"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"Modeling for critical design and performance of wafer level chip scale package\",\"authors\":\"Y. Liu, Qiuxiao Qian, M. Ring, Jihwan Kim, D. Kinzer\",\"doi\":\"10.1109/ECTC.2012.6248985\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Comprehensive finite element analysis (FEA) modeling is carried out to improve the performance of critical designs of wafer level chip scale package (WLCSP). First, a design with one layer redistribution layout (RDL) copper with etched pocket in the non-covered UBM area and one layer polyimide structure (1Cu1Pi design) is investigated. Different polyimide layouts, copper thicknesses, pocket parameters and non-covered UBM diameters are studied through finite element modeling. Then, a stacked metal design with the sputtered copper UBM stacked on the RDL copper layer, with one polyimide layer between them (2Cu1Pi) for the WLCSP is examined. Parameter study of different UBM diameters with the same solder volume and different UBM diameters with the same solder joint height is conducted by the simulation. Finally the correlation and comparison of the failure mechanism between the modeling and the test are presented and discussed.\",\"PeriodicalId\":6384,\"journal\":{\"name\":\"2012 IEEE 62nd Electronic Components and Technology Conference\",\"volume\":\"24 1\",\"pages\":\"1174-1182\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-07-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE 62nd Electronic Components and Technology Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ECTC.2012.6248985\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE 62nd Electronic Components and Technology Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ECTC.2012.6248985","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 11

摘要

为了提高晶圆级芯片规模封装(WLCSP)关键设计的性能,进行了全面的有限元分析(FEA)建模。首先,研究了一种非覆盖UBM区域的一层再分布布局(RDL)带蚀刻口袋的铜和一层聚酰亚胺结构(1Cu1Pi设计)的设计。通过有限元建模研究了不同的聚酰亚胺布局、铜厚度、口袋参数和未覆盖的UBM直径。然后,研究了一种叠层金属设计,将溅射铜UBM堆叠在RDL铜层上,并在它们之间放置一层聚酰亚胺(2Cu1Pi)用于WLCSP。通过仿真研究了相同焊料体积下不同焊管直径和相同焊点高度下不同焊管直径的参数。最后对模型与试验的破坏机理进行了相关性和对比分析。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modeling for critical design and performance of wafer level chip scale package
Comprehensive finite element analysis (FEA) modeling is carried out to improve the performance of critical designs of wafer level chip scale package (WLCSP). First, a design with one layer redistribution layout (RDL) copper with etched pocket in the non-covered UBM area and one layer polyimide structure (1Cu1Pi design) is investigated. Different polyimide layouts, copper thicknesses, pocket parameters and non-covered UBM diameters are studied through finite element modeling. Then, a stacked metal design with the sputtered copper UBM stacked on the RDL copper layer, with one polyimide layer between them (2Cu1Pi) for the WLCSP is examined. Parameter study of different UBM diameters with the same solder volume and different UBM diameters with the same solder joint height is conducted by the simulation. Finally the correlation and comparison of the failure mechanism between the modeling and the test are presented and discussed.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信