集成多壁碳纳米管的定位长度

2021 IEEE International Interconnect Technology Conference (IITC) Pub Date : 2014-05-20 DOI:10.1109/IITC.2014.6831852

H. Fiedler, S. Hermann, M. Rennau, S. Schulz, T. Gessner

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引用次数: 0

摘要

我们在晶圆尺度上制备了基于碳纳米管的过孔。基于电特性，我们提取了CNTs的定位长度。对于短碳纳米管，经典输运模式是有效的，而对于长碳纳米管，Anderson本地化模式则适用。补充的特征长度尺度是基于碳纳米管的结构与从电测量中提取的参数很好地一致来估计的。

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Localization length of integrated multi-walled carbon nanotubes

We prepared CNT based vias on wafer scale. Based on the electrical characterization we extracted the localization length of the CNTs. While for short CNTs the classical transport regime is valid, the Anderson localization regime applies for longer CNTs. Supplementary the characteristic length scales were estimated based on the structure of the CNTs being in good agreement with the parameters extracted from the electrical measurements.

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2021 IEEE International Interconnect Technology Conference (IITC)

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