p-NiO/ITO透明异质结的制备与表征

C. C. Forin, M. Purica, E. Budianu, P. Schiopu
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引用次数: 8

摘要

在玻璃衬底上制备了由p型NiO和n型ITO透明氧化半导体组成的透明异质结。采用直流溅射法制备50 nm金属Ni薄膜,在430℃下热氧化得到p型半导体透明NiO层。用于研究光学性质的分光光度测量显示,在300-900 nm的光谱范围内,NiO的透过率高于70%,ITO的透过率高于90%。得到的p-NiO/n-ITO异质结在紫外辐射(λ ~ 240 nm)下具有较宽的带隙,具有良好的灵敏度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
p-NiO/ITO transparent heterojunction — Preparation and characterization
The paper presents the preparation of a transparent heterojunction on glass substrate consisting of p type NiO and n type ITO transparent oxidic semiconductors. NiO layer as a p type semiconductor and transparent layer was obtained by thermal oxidation at 430 oC of 50 nm metallic Ni films deposited by DC sputtering. Spectrophotometrical measurements used to investigate optical properties revealed a transmittance higher than 70% for NiO and 90% for ITO in the spectral range of 300-900 nm. The obtained p-NiO/n-ITO heterojunction exposed to ultraviolet radiation (λ ~ 240 nm) shows a good sensibility due to wide band gap of the layers.
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