用于湿度传感的喷墨印刷电容式微机械超声换能器

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI:10.1109/NEMS50311.2020.9265591

Zhou Zheng, Naeun Kim, Jiaqi Wang, W. Wong, J. Yeow

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引用次数: 0

摘要

本研究提出了一种以喷墨印刷技术为基础的微型化CMUT水分传感器。制作了设计成六边形单元排列的多单元CMUT。在CMUT表面喷墨打印氧化石墨烯传感膜，用于吸附水分子。测试了湿度传感器的灵敏度、重复性和滞后特性。喷墨打印的CMUT的迟滞水平比我们以前的滴铸器件明显降低。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Inkjet-Printed Capacitive Micromachined Ultrasonic Transducer (CMUT) for Moisture Sensing

This study presents a miniaturized CMUT- based moisture sensor that is functionalized by the inkjet printing technique. The multi-cell CMUT designed in a hexagonal cell arrangement was fabricated. A graphene oxide sensing film was inkjet-printed on the surface of the CMUT for adsorption of water molecules. The sensitivity, repeatability, and hysteresis characteristics of the moisture sensor were tested. The inkjet-printed CMUT showed a significantly reduced hysteresis level than our previous drop- casted devices.

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来源期刊

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)

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