{"title":"III-V干法加工从研发到生产","authors":"Dr Jy Bhardwaj (Technical Manager, STS Ltd.)","doi":"10.1016/0959-3527(90)90124-C","DOIUrl":null,"url":null,"abstract":"<div><p>Issues relating to the use of III–V dry processing for device fabrication in R&D and production are critically important. Of particular concern are current process and equipment limits which can prevent scaling to full device production.</p></div>","PeriodicalId":100494,"journal":{"name":"Euro III-Vs Review","volume":"3 4","pages":"Pages 40-41"},"PeriodicalIF":0.0000,"publicationDate":"1990-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0959-3527(90)90124-C","citationCount":"0","resultStr":"{\"title\":\"III–V dry processing from R&D to production\",\"authors\":\"Dr Jy Bhardwaj (Technical Manager, STS Ltd.)\",\"doi\":\"10.1016/0959-3527(90)90124-C\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Issues relating to the use of III–V dry processing for device fabrication in R&D and production are critically important. Of particular concern are current process and equipment limits which can prevent scaling to full device production.</p></div>\",\"PeriodicalId\":100494,\"journal\":{\"name\":\"Euro III-Vs Review\",\"volume\":\"3 4\",\"pages\":\"Pages 40-41\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1990-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0959-3527(90)90124-C\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Euro III-Vs Review\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/095935279090124C\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Euro III-Vs Review","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/095935279090124C","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Issues relating to the use of III–V dry processing for device fabrication in R&D and production are critically important. Of particular concern are current process and equipment limits which can prevent scaling to full device production.
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