超近距离雷达用超低球密度超大比扇出片级封装可靠性研究

P.S. Huang, C.K. Yu, W. S. Chiang, M. Z. Lin, Y.H. Fang, M. J. Lin, N. Liu, B. Lin, I. Hsu
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引用次数: 2

摘要

随着汽车应用对电子产品的高稳健性要求的迅猛发展,元器件级和电路板级的可靠性都必须更加关注安全保障。本文介绍了一种采用互补金属氧化物半导体(CMOS)技术实现并采用扇出晶圆级封装(FOWLP)技术组装的系统级毫米波超短距离雷达(mmWave USRR),并通过实验研究了芯片-板相互作用(CBI)风险下的板级可靠性(BLR)。实验研究了影响CBI性能的主要因素焊球材料、封装厚度和衬底材料。首先,研究了两种焊料材料,以评估它们在该FOWLP中抗板级热循环和跌落测试的能力。结果表明,弹性模量较高的焊料在板级热循环(BLTC)可靠性方面表现较好。此外,由于两种焊料材料均未发生故障,因此在电路板水平跌落测试中没有发现差异。对425µm和580µm封装厚度在板级可靠性上进行了研究,结果表明,采用更厚的Si模和更厚的成型材料的设计显著提高了BLTC的可靠性。采用低cte底填材料和边粘胶两种环氧基材料,研究了在FOWLP上提高BLTC性能的可加工性。实验结果表明,两种环氧材料均显著降低了BLTC的性能,并出现了严重的焊料裂纹和大块底填裂纹。由于振动测试在汽车电子产品中是必不可少的,也是备受关注的,因此采用正弦波扫描频率从20 Hz到2000 Hz,峰值加速度为50g或20g的严格测试条件,对安装在菊链PCB上的FOWLP mTV的抗振动性能进行了评估。从50g峰值加速度振动试验结果来看,在连接角焊料球的特定菊花链回路中发现了高电阻。从失效分析中可以发现,在元件侧重分布层(RDL)和凹凸下金属化层(UBM)的界面和PCB板的铜迹裂纹处存在分层现象。值得注意的是,在z轴振动作用下,所有的失效只发生在位于5x3阵列角的封装上。从经验来看,在振动平台上固定不良的PCB可能会在z方向振动期间导致PCB上更多的弯曲污渍,并进一步在拐角附近集中更高的应力。此外,还进行了20g峰值加速度的板级振动测试,未发现任何故障。最后,对超大面积比FOWLP的BLR进行了深入研究,证明了该封装能够满足AEC-Q100的严格可靠性测试要求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability Investigation of Extremely Large Ratio Fan-Out Wafer-Level Package with Low Ball Density for Ultra-Short-Range Radar
Driven by aggressive development of electronic products with high robustness demand for automotive application to endure severe usage environment, both component-level and board-level reliabilities have to be concerned more for safety assurance. In this paper, a system-on-chip millimeter-wave ultra-short range radar (mmWave USRR) realized in complementary metal-oxide-semiconductor (CMOS) technology and assembled with fan-out wafer level packaging (FOWLP) technology was introduced, and the board-level reliability (BLR) was studied experimentally on the risk of chip-to-board interaction (CBI). The factors of solder ball material, package thickness and underfill material, thought to dominate on CBI performance, were studied experimentally. First of all, two solder materials were studied to evaluate their capabilities for this FOWLP to against board level thermal cycling and drop tests. It was found that the solder with higher elastic modulus performed much better on board-level thermal cycling (BLTC) reliability. Moreover, no difference was found in board level drop test since no failure occurred in both solder materials. Both package thicknesses of 425 µm and 580 µm were studied on the board level reliabilities, and the results revealed that the design with both thicker Si die and thicker molding material significantly improved the BLTC reliability. Both epoxy-based materials - one is low-CTE underfill material and the other is edge-bond glue, were applied to know the workability of enhancing the BLTC performance on the FOWLP. The experiment results showed that both the epoxy materials miserably decreased the BLTC performance, and severe solder crack and bulk underfill crack were found. Since vibration test is indispensable and of much concern for automotive electronics, the stringent test condition of sine-wave frequency swept from 20 Hz to 2,000 Hz and peak acceleration of either 50g or 20g, was applied to evaluate anti-vibration property of the FOWLP mTV mounted on daisy-chain PCB. From the results of 50g peak acceleration vibration test, high resistance was found in the specific daisy-chain loop which electrically connects corner solder balls. From the failure analysis it could be found that delamination existed at the interface of redistribution layer (RDL) and under-bump metallization (UBM) of component side and PCB Cu trace crack. It is noteworthy that all the failures only happened on the package located at the 5x3 array corner while subjecting to Z-axis vibration. From experience, poorly fixing the PCB on vibration platform potentially causes more bending stain on PCB during Z-direction vibration and further concentrates much higher stress singularly nearby the corner. Moreover, the board-level vibration test with 20g peak acceleration was also implemented, and there wasn't any failure found. Finally, the BLR was thoroughly studied for the extremely large area-ratio FOWLP, and the package was proved its capability of meeting AEC-Q100 compliant stringent reliability tests.
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