高电阻率p型无角多晶片的有效寿命超过1ms

J. Hofstetter, R. Fraser, R. Jonczyk, A. Erşen, John Linton, A. Lorenz
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引用次数: 0

摘要

采用直接晶圆技术,通过对熔体中硼浓度的精确控制,生长出了不同电阻率的无角p型晶圆。在极低硼浓度下,体电阻率值达到了> 100 Ω-cm,有效寿命大于1 ms,对应于估计的体寿命约为2 ms。与锭基晶圆片相比,使用直接晶圆技术的连续生长在任何期望的目标电阻率下都能产生非常紧密的电阻率分布,而不会因区域精炼而产生变化。此外,该技术还可以实现3D晶圆的生长,例如,具有厚框架的薄晶圆可以保持晶圆的机械强度。因此,Direct晶圆产品可以根据给定的太阳能电池结构定制,通过在最佳体积电阻率和最佳厚度下生长每个单独的晶圆。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Exceeding 1 ms effective lifetime in High High-Resistivity P-Type Kerfless Multi-crystalline Wafers
Kerfless p-type wafers of varying resistivity are grown with Direct Wafer technology with precise control of dosing the Boron concentration in the melt. At very low Boron concentration, bulk resistivity values ≫100 Ω-cm are achieved and an effective lifetime above 1 ms is measured, corresponding to an estimated bulk lifetime around 2 ms. In contrast to ingot-based wafers, continuous growth using Direct Wafer technology produces a very tight resistivity distribution at any desired target resistivity, without variations caused by zone refining. In addition, the technology enables growth of 3D wafers, e.g. thin wafers with a thick frame that allows to maintain mechanical wafer strength. Thus, Direct Wafer product can be customized for a given solar cell architecture by growing each individual wafer at the optimum bulk resistivity and optimum thickness.
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