紧凑的原位显微镜光电子能谱通过双镜反射

IF 3.3 2区物理与天体物理 Q2 OPTICS

Chinese Optics Letters Pub Date : 2023-01-01 DOI:10.3788/col202321.061101

Chenyang Yue, Hong Jiang, Tianzhi Li, Siyan Yao, Shengyue Zeng, Xiaojun Xu, Chaofan Zhang

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引用次数: 0

摘要

光电子能谱是表征材料电子结构的有力工具。为了以高探测效率研究感兴趣的特定区域，在这项工作中，我们提出了一种紧凑的机构显微镜来辅助光电子能谱。介绍了长物距200mm双镜反射的结构。实现了5 ~ 100倍的放大倍率、4.08 μ m的横向分辨率和4.49 μ m的纵向分辨率。同时，测试结果表明，该显微镜具有较大的焦深。类似的配置也可以应用于其他电子显微镜，以提高其探测能力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Compact in situ microscope for photoelectron spectroscopy via two-mirror reflection

Photoelectron spectroscopy is a powerful tool in characterizing the electronic structure of materials. To investigate the specific region of interest with high probing efficiency, in this work we propose a compact insitumicroscope to assist photoelectron spectroscopy. The configuration of long objective distance of 200 mm with two-mirror reflection has been introduced. Large magnification of 5 × to 100 × , lateral resolution of 4.08 μ m, and longitudinal resolution of 4.49 μ m have been achieved. Meanwhile, the testing result shows larger focal depth of this insituoptical microscope. Similar configu-rations could also be applied to other electronic microscopes to improve their probing capability.

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来源期刊

Chinese Optics Letters 物理-光学

CiteScore

5.60

自引率

20.00%

发文量

180

审稿时长

2.3 months

期刊介绍： Chinese Optics Letters (COL) is an international journal aimed at the rapid dissemination of latest, important discoveries and inventions in all branches of optical science and technology. It is considered to be one of the most important journals in optics in China. It is collected by The Optical Society (OSA) Publishing Digital Library and also indexed by Science Citation Index (SCI), Engineering Index (EI), etc. COL is distinguished by its short review period (~30 days) and publication period (~100 days). With its debut in January 2003, COL is published monthly by Chinese Laser Press, and distributed by OSA outside of Chinese Mainland.