高速硅光电探测器工艺条件及增加波长分辨数的量子阱结构模拟研究

Seongjae Cho, Hyungjin Kim, Min-Chul Sun, T. Kamins, Byung-Gook Park, J. Harris
{"title":"高速硅光电探测器工艺条件及增加波长分辨数的量子阱结构模拟研究","authors":"Seongjae Cho, Hyungjin Kim, Min-Chul Sun, T. Kamins, Byung-Gook Park, J. Harris","doi":"10.1109/SNW.2012.6243286","DOIUrl":null,"url":null,"abstract":"In this work, process conditions and geometric parameters for high-speed p-i-n silicon photodetector are optimized by device simulation. Efforts were made to build up criteria for device fabrication based on silicon epitaxy. For an optimized silicon photodetector, a bandwidth as wide as 80 GHz was obtained at 1 V. Furthermore, a way of increasing wavelength discriminations by introducing silicon-germanium quantum wells for multiple-wavelength signal processing is exploited.","PeriodicalId":6402,"journal":{"name":"2012 IEEE Silicon Nanoelectronics Workshop (SNW)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2012-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Simulation study on process conditions for high-speed silicon photodetector and quantum-well structuring for increased number of wavelength discriminations\",\"authors\":\"Seongjae Cho, Hyungjin Kim, Min-Chul Sun, T. Kamins, Byung-Gook Park, J. Harris\",\"doi\":\"10.1109/SNW.2012.6243286\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, process conditions and geometric parameters for high-speed p-i-n silicon photodetector are optimized by device simulation. Efforts were made to build up criteria for device fabrication based on silicon epitaxy. For an optimized silicon photodetector, a bandwidth as wide as 80 GHz was obtained at 1 V. Furthermore, a way of increasing wavelength discriminations by introducing silicon-germanium quantum wells for multiple-wavelength signal processing is exploited.\",\"PeriodicalId\":6402,\"journal\":{\"name\":\"2012 IEEE Silicon Nanoelectronics Workshop (SNW)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-06-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE Silicon Nanoelectronics Workshop (SNW)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SNW.2012.6243286\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE Silicon Nanoelectronics Workshop (SNW)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SNW.2012.6243286","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

本文通过器件仿真优化了高速p-i-n硅光电探测器的工艺条件和几何参数。努力建立基于硅外延的器件制造标准。优化后的硅光电探测器在1v电压下可获得80ghz宽的带宽。此外,本文还提出了一种通过引入硅锗量子阱来提高多波长信号处理的波长分辨能力的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Simulation study on process conditions for high-speed silicon photodetector and quantum-well structuring for increased number of wavelength discriminations
In this work, process conditions and geometric parameters for high-speed p-i-n silicon photodetector are optimized by device simulation. Efforts were made to build up criteria for device fabrication based on silicon epitaxy. For an optimized silicon photodetector, a bandwidth as wide as 80 GHz was obtained at 1 V. Furthermore, a way of increasing wavelength discriminations by introducing silicon-germanium quantum wells for multiple-wavelength signal processing is exploited.
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