对两种不同离子注入WC-Co刀具后相似深度剖面的建模,用于木质材料加工

M. Barlak, J. Wilkowski, Zbigniew Werner
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引用次数: 1

摘要

对两种不同离子注入WC-Co刀具后相似深度剖面的建模,用于木质材料加工。本文尝试模拟两种常用气体(即氮气和氩气)离子的相似深度分布,以获得使用经典注入器可能获得的参数值。建模分两个阶段进行。氮气条件下的加速电压值为35kv,氩气条件下的加速电压之和为65+32.5 kV,得到了类似的曲线。得到的剖面参数值的差异小于1%,如:注入元素的峰值体积掺杂浓度、投影范围和偏离范围。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modelling of the similar depth profiles of two different kinds of ions,implanted to WC-Co tools, used in wood-based material machining
Modelling of the similar depth profiles of two different kinds of ions, implanted to WC-Co tools, used in wood-based material machining. An attempt was made to model the similar depth profiles of ions of two commonly used gases, i.e., nitrogen and argon, for the parameter values possible to obtain using classical implanters. Modelling was executed in two stages. Similar profiles were obtained for the acceleration voltage value of 35 kV in the case of nitrogen and the sum of the acceleration voltages of 65+32.5 kV in the case of argon. The difference in the obtained profile parameter values, such as: the peak volume dopant concentration of the implanted element, the projected range and the range straggling, was less than 1%.
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