集电极和碱掺杂浓度的电谱分析

International Electron Devices Meeting 1991 [Technical Digest] Pub Date : 1991-12-08 DOI:10.1109/IEDM.1991.235292

T. Chiu, J. Sung, J. Pavlo, T.-Y.M. Liu, K.F. Lee, W. Possanza, K. Moerschel

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引用次数: 4

摘要

报道了一种对双极器件集电极载流子密度进行电谱分析的方法。碱掺杂剖面也可得到。这种测量技术在监测外延厚度和基宽方面也很有用。测量方法简单、经济、准确。

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Electrical profiling of collector and base doping concentration

A method for electrically profiling the collector carrier density of a bipolar device is reported. The base doping profile is also obtainable. This measurement technique is also useful in monitoring epi thickness and base width. The measurements are simple, economical, and accurate.<>

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来源期刊

International Electron Devices Meeting 1991 [Technical Digest]

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