RDL-first FOWLP晶圆级焊球放置工艺的开发

S. Lim, N. Jaafar, S. Chong, S. Lim, T. Chai
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引用次数: 1

摘要

扇出晶圆级封装技术是一种集成电路技术,也是标准晶圆级封装(WLP)解决方案的增强。该技术对于移动应用程序和异构集成来说是一种有吸引力的打包方法。与晶圆堆叠或3D堆叠键合相比,它具有更好的电气性能,低尺寸和相对较低的成本。此外,随着行业向更高密度和更高带宽的芯片到芯片互连发展,封装对封装技术的应用为应用处理器和移动应用提供了一种具有更好热电性能的解决方案。包对包的FOWLP的一个重要优点是能够堆叠2个不同的包以实现多功能。但是,对于瘦的便携式应用程序,整个包必须保持低调。本文主要研究了采用RDL-first FOWLP工艺在模制晶圆片上进行晶圆级焊球放置的工艺。Fanout模制晶片厚度为0.47mm,封装尺寸为模拟后的尺寸。本文主要研究了采用RDL-first FOWLP工艺在模制晶圆片上进行晶圆级焊球放置的工艺。Fanout模制晶片厚度为0.47mm,计算后封装尺寸为$15 \乘以15\ \mathbf{mm}^{2}$。需要评估焊剂印刷工艺参数的详细工艺参数,如印刷速度和印刷间隙与球体放置速度、球体点胶间隙和球头移动方向的耦合,以实现具有良好的焊剂印刷和良好的球体放置工艺良率的稳定的晶圆级焊剂球放置工艺。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of wafer level solderball placement process for RDL-first FOWLP
The Fan-out wafer-level packaging technology is an integrated circuit technology as well as an enhancement of standard wafer-level packaging (WLP) solutions. This technology is an attractive packaging approach for mobile applications and heterogeneous integration. It allows better electrical performance, low form factor and at relatively low cost as compared to wafer to wafer stacking or 3D stacked bonding. Furthermore, as the industry moving towards higher density and higher-bandwidth chip to chip interconnections, the application of Package on Package technology offers a solution for applications processors and mobile applications with better thermal and electrical performance. One of the significant advantages of package-on-package FOWLP is the ability of stacking 2 different packages to achieve multi-functionality. However, the overall package has to maintain a low profile for thin portable applications. The work in this paper focus on the development and process of wafer level solderball placement on a molded wafer using RDL-first FOWLP process. The Fanout molded wafer is 0.47mm thick and the package size is after singulation. The work in this paper focus on the development and process of wafer level solderball placement on a molded wafer using RDL-first FOWLP process. The Fanout molded wafer is 0.47mm thick and the package size is $15 \times 15\ \mathbf{mm}^{2}$ after singulation. Detailed process parameters on flux printing process parameters such as the printing speed and printing gap coupled with ball placement speed, ball dispense gap and ball head moving direction needs to be evaluated to achieve robust wafer level solderball placement process with good flux printing and good ball placement process yield.
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