使用双端口矢量网络分析仪对四端口电路进行晶圆上实验表征

2008 IEEE International Conference on Semiconductor Electronics Pub Date : 2008-12-09 DOI:10.1109/SMICND.2008.4703375

S. Simion, G. Sajin, R. Marcelli, G. Bartolucci

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引用次数: 2

摘要

本文提出了一种利用双端口VNA(矢量网络分析仪)表征四端口电路的实验方法。以某耦合器为例，给出了该方法的应用实例。该方法的计算结果与仿真的预期结果吻合较好。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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On-wafer experimental characterization for a 4-port circuit, using a two-port Vector Network Analyzer

The paper presents an experimental method useful to characterize a four-port circuit, using a two-port VNA (vector network analyzer). As an example, the method is applied for a coupler. The results obtained by using this method and the expected results obtained by simulation are in good agreement.

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来源期刊

2008 IEEE International Conference on Semiconductor Electronics

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