Microfabrication of a Miniaturized Monolithic Folded Half-Mode Integrated Waveguide Cavity for W-Band Applications

This paper presents the microfabrication of a miniaturized folded half-mode integrated waveguide cavity for operation at millimetre-wave frequencies in W-band. A half-mode cavity is wrapped around a middle metallization layer within its structure, effectively folding the fundamental resonance mode. Compared to standard rectangular waveguide cavity footprint, a miniaturization on the order of 91% is demonstrated. The folded half-mode integrated waveguide cavity has a measured resonance frequency of 87.3 GHz, and measured unloaded quality factor of 101. The fabrication process is completely monolithic, allowing for Integration with IC.