{"title":"支持光学扫描的紧凑XYZ纳米对位器的开发","authors":"Yue Wang, Peng Yan","doi":"10.1109/3M-NANO.2018.8552171","DOIUrl":null,"url":null,"abstract":"In this paper we consider the design, analysis and experimental validations of an XYZ PZT driven nano-positioning stage to support high precision optical scanning systems. The overall motion stage consists of a parallel XY-nanopositioner and a Z-axis nanopositioner mounted in series on the XY stage. To achieve fast and high precision motions with loads from the optical systems, a novel hollow structural design is proposed, where the flexure based mechanism is further optimized to increase the output displacement while ensuring a relatively high natural frequency. Then the static model of the stage is developed for the lever and guiding mechanisms and its accuracy is verified by FEA(Finite Element Analysis). The proposed 3-DOF(Degree of Freedom) nanopositioner is manufactured and experimentally investigated. Experimental tests show that the nanopositioner has natural frequencies of 855 Hz, 865 Hz and 1019 Hz for X, Y and Z axes, respectively. Meanwhile the maximum travel ranges of 71 μm, 71 μm and 52 μm are obtained along x, y and z directions, which demonstrate large strokes and relatively high natural frequencies for the 3-DOF optical nanopositioner.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"92 1","pages":"288-293"},"PeriodicalIF":0.0000,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Development of a Compact XYZ Nanopositioner Supporting Optical Scanning\",\"authors\":\"Yue Wang, Peng Yan\",\"doi\":\"10.1109/3M-NANO.2018.8552171\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we consider the design, analysis and experimental validations of an XYZ PZT driven nano-positioning stage to support high precision optical scanning systems. The overall motion stage consists of a parallel XY-nanopositioner and a Z-axis nanopositioner mounted in series on the XY stage. To achieve fast and high precision motions with loads from the optical systems, a novel hollow structural design is proposed, where the flexure based mechanism is further optimized to increase the output displacement while ensuring a relatively high natural frequency. Then the static model of the stage is developed for the lever and guiding mechanisms and its accuracy is verified by FEA(Finite Element Analysis). The proposed 3-DOF(Degree of Freedom) nanopositioner is manufactured and experimentally investigated. Experimental tests show that the nanopositioner has natural frequencies of 855 Hz, 865 Hz and 1019 Hz for X, Y and Z axes, respectively. Meanwhile the maximum travel ranges of 71 μm, 71 μm and 52 μm are obtained along x, y and z directions, which demonstrate large strokes and relatively high natural frequencies for the 3-DOF optical nanopositioner.\",\"PeriodicalId\":6583,\"journal\":{\"name\":\"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"92 1\",\"pages\":\"288-293\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2018.8552171\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2018.8552171","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Development of a Compact XYZ Nanopositioner Supporting Optical Scanning
In this paper we consider the design, analysis and experimental validations of an XYZ PZT driven nano-positioning stage to support high precision optical scanning systems. The overall motion stage consists of a parallel XY-nanopositioner and a Z-axis nanopositioner mounted in series on the XY stage. To achieve fast and high precision motions with loads from the optical systems, a novel hollow structural design is proposed, where the flexure based mechanism is further optimized to increase the output displacement while ensuring a relatively high natural frequency. Then the static model of the stage is developed for the lever and guiding mechanisms and its accuracy is verified by FEA(Finite Element Analysis). The proposed 3-DOF(Degree of Freedom) nanopositioner is manufactured and experimentally investigated. Experimental tests show that the nanopositioner has natural frequencies of 855 Hz, 865 Hz and 1019 Hz for X, Y and Z axes, respectively. Meanwhile the maximum travel ranges of 71 μm, 71 μm and 52 μm are obtained along x, y and z directions, which demonstrate large strokes and relatively high natural frequencies for the 3-DOF optical nanopositioner.
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