射频器件分段边缘密封圈的可靠性

2021 IEEE International Interconnect Technology Conference (IITC) Pub Date : 2014-05-20 DOI:10.1109/IITC.2014.6831836

J. Gambino, R. Graf, J. Malinowski, A. Cote, W. Guthrie, K. Watson, P. Chapman, K. K. Sims, M. D. Levy, T. Aoki, G. A. Mason, M. Jaffe

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引用次数: 3

摘要

射频器件对器件间的噪声耦合非常敏感。联轴器的一个来源是边缘密封圈。我们建议使用分段保护环来减少设备之间的耦合。我们证明了分段保护环对于0.18 μm射频技术是可靠的。

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Reliability of segmented edge seal ring for RF devices

RF devices are sensitive to noise coupling between devices. One source of coupling is the edge seal ring. We propose using a segmented guard ring to reduce coupling between devices. We demonstrate that the segmented guard ring is reliable for a 0.18 μm RF technology.

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2021 IEEE International Interconnect Technology Conference (IITC)

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