带有数字输出的单片表面微加工z轴陀螺仪

2000 Symposium on VLSI Circuits. Digest of Technical Papers (Cat. No.00CH37103) Pub Date : 2000-06-15 DOI:10.1109/VLSIC.2000.852839

Xuesong Jiang, J. Seeger, M. Kraft, B. Boser

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引用次数: 121

摘要

采用2 /spl μ m CMOS和2.25 /spl μ m厚度的机械多晶硅，采用单片MEMS/电路技术制备了带片上A/D转换器的单片表面微加工z轴振动速率陀螺仪。片上位置检测电路采用相关双采样来抑制1/f和kT/C噪声，并解析0.02埃位移。陀螺仪在大气压下实现3/声压度//秒//声压径向/Hz的噪声底限，并从单个5 V电源工作。

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A monolithic surface micromachined Z-axis gyroscope with digital output

A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.

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2000 Symposium on VLSI Circuits. Digest of Technical Papers (Cat. No.00CH37103)

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