氧化硅薄膜中的导电

M. Stuart
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引用次数: 39

摘要

研究了蒸发氧化硅薄膜的电流-电压行为。结果表明,导电是体积受限的,并严格服从修正的Poole-Frenkel方程。这个方程是从包含供体和陷阱的绝缘体模型推导出来的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Conduction in silicon oxide films
The current-voltage behaviour of evaporated silicon oxide films has been investigated. It is shown that conduction is bulk limited and closely obeys a modified Poole-Frenkel equation. This equation is derived from a model of the insulator containing donors and traps.
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