A MEMS Based Electrochemical Rotational Vibration Sensor

A novel electrochemical rotational vibration sensor is proposed in this study, which is based on Micro-electric-mechanical System (MEMS) technology, capable of measuring low-frequency angular acceleration and velocity. In this study 1) a calculation model for the sensor designed was built, and the key structure parameters were calculated and optimized by the multi-field coupling numerical simulation method; 2) Microelectrode is designed and fabricated, and the most simplified device package is implemented, reporting the angular acceleration sensitivity higher than 2 V/(rad/s2), and the angular velocity sensitivity higher than 14 V/(rad/s) below 1 Hz without electronic circuit compensation. Compared to conventional counterparts, the micro sensor proposed in this study is featured with simple electrode structure and fabrication process, with the potential of mass fabrication of devices with high consistency.