有毒气体测量传感器结构的设计与制造

2013 Spanish Conference on Electron Devices Pub Date : 2013-03-21 DOI:10.1109/CDE.2013.6481354

J. Gonzalez-Chavarri, I. Castro-Hurtado, G. Mandayo, E. Castaño

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引用次数: 1

摘要

本文介绍了在苯气体传感器件上直接生长氧化锌纳米结构的方法。该传感器由氧化铝衬底与铂互指微电极和铂加热器组成。纳米结构的生长过程基于气-液-固方法，从射频溅射锌薄膜开始。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design and fabrication of sensor structures for the measurement of toxic gases

In this paper the direct growth of ZnO nanostructures onto a sensing device for benzene gas sensing is presented. This sensor consists in an alumina substrate with platinum interdigitated microelectrodes and a Pt heater. The nanostructure growth process is based on a vapor-liquid-solid method starting from a RF sputtered Zn thin film.

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2013 Spanish Conference on Electron Devices

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