流体排列,密集的单壁碳纳米管阵列作为潜在的模具粘合剂和热界面材料

H. Rong, Baoming Wang, Miao Lu
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引用次数: 1

摘要

报道了一种简单的室温工艺,可以在两个芯片之间流体组装密集的垂直排列的单壁碳纳米管并将它们连接在一起。由于具有更好的机械性能和热性能,该技术具有将模具附着在封装散热器上的潜在能力,取代了常用的模具粘合剂。将预处理后表面形成约2 μm深沟槽的两个芯片正面压在一起,利用毛细力将SWNT水溶液注入到两个芯片之间的沟槽中。研究发现,单壁碳纳米管梁是组装的,其两端同时与两个芯片结合。对这一现象的机理进行了实验和理论探讨。在此基础上,进行了不同溶液浓度、不同沟槽尺寸、多次浸渍、多次烘烤等工艺参数下的试验,测定了不同工艺参数下两种切屑在完全除湿后的抗剪强度。结果表明,抗剪强度可达100 kPa左右。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fluidic aligned, dense SWNTs arrays as potential die adhesive and thermal interface material
A simple, room temperature process was reported to fluidic assemble dense, vertically aligned SWNTs between two chips and connect them together. This technology has the potential capability to attach a die to its heat sink in packaging replacing the common available die adhesives by virtue of better mechanical and thermal properties. Two chips with trench about 2 μm deep on the pre-treated surface were pressed together face to face, and SWNT aqueous solution was driven into the gap between the two chips by capillary force. SWNTs beams were found to be assembled and have their two ends bonding with the two chips simultaneously. The mechanism of this phenomenon was explored experimentally and theoretically. In further, a series of experiments with different process parameters like different solution concentration, different dimensions of the trenches, multiply dipping and baking cycles were implemented, and the shear strength between the two chips with these different processing parameters was measured after removing moisture completely. In result, shear strength up to about 100 kPa was demonstrated.
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