Magnetic, out-of-plane, totaly integrated bistable /spl mu/-actuator

Magnets are gradually appearing in the world of microactuators and power MEMS, particularly for applications such as microswitches. This article is devoted to the design, simulation and prototyping of a microactuator with high vertical displacement, based on integrated permanent magnets. Its main characteristics are: high displacement (in excess of 100 /spl mu/m), low switching time (300 /spl mu/s for 100 /spl mu/m) and bistability. The pulsed current for commutation is optimized for the lowest possible energy per pulse (minimum of 15 /spl mu/J). The main innovation of this design is that the moving part has no mechanical connection and is guided by magnetic levitation. This article is about the problems involved in the design (bistability, dynamic study, thermal study) and prototyping of our /spl mu/-actuator.