带有喷涂驻极体的MEMS静电能量收集装置

2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2017-08-01 DOI:10.1109/3M-NANO.2017.8286330

Anxin Luo, Yixin Xu, Siyan Chen, Hanning Dong, Yulong Zhang, Fei Wang

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引用次数: 1

摘要

本文介绍了静电能量收集的设计与测量。采用先进的微机电系统(MEMS)技术，研制了一种具有面外闭合方案的喷涂驻极体静电能量采集器。该设备的尺寸为13×18 mm2。匹配电阻为21 MΩ时，在28.5 m/s2加速度下，谐振频率为154 Hz，输出功率为12 μW。本装置在100℃的温度下进行热稳定性测试，34小时后可输出良好的功率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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MEMS electrostatic energy harvesting device with spray coated electret

This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 13×18 mm2. With the matched resistance of 21 MΩ, an output power of 12 μW is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s2. The thermal stability of this device is tested on 100 °C, decent power can be output after 34 hours.

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来源期刊

2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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