三自由度长行程电磁直驱纳米定位台的设计与驱动

2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2017-08-01 DOI:10.1109/3M-NANO.2017.8286316

Xixian Mo, Bo Zhang

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引用次数: 0

摘要

本文提出了一种新型的三自由度纳米级定位平台电磁驱动方案。三个空气轴承用于为舞台提供抗重力的悬浮力。该平台在xy平面50 × 50 mm的行程范围内具有+-50nm的位置分辨率。详细说明了驱动方案、机械系统的设计。采用硬件在环仿真方案构建了该舞台的控制系统。描述了舞台的动态模型，设计了舞台控制器。我们提供了测试结果来证明所提出的阶段的精确定位能力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design and driving of a 3-DOF electromagnetic direct-drive nanopositioning stage with long stroke

In this paper, we present a novel electromagnetic driving scheme for nano-scale positioning stage with three-degree-of-freedom. Three air bearings are used to provide the suspension force for the stage against gravity. The stage has a +-50nm position resolution over a travel range of 50 × 50 mm in the xy plane. We explain the actuating scheme, the design of mechanical system in detail. The hardware-in-loop simulation scheme is adopted to build the control system of the stage. We describe the dynamic model of the stage and design its controller. We provide the test results to demonstrate the precision positioning capabilities of the proposed stage.

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2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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