线性驱动压电微悬臂梁的四方组成PZT薄膜

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474266

T. Kobayashi, N. Makimoto, T. Oikawa, A. Wada, H. Funakubo, R. Maeda

{"title":"线性驱动压电微悬臂梁的四方组成PZT薄膜","authors":"T. Kobayashi, N. Makimoto, T. Oikawa, A. Wada, H. Funakubo, R. Maeda","doi":"10.1109/MEMSYS.2013.6474266","DOIUrl":null,"url":null,"abstract":"We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm2, 20 V, and -42 pm/V by applying AC voltage of 80 V as \"wakeup\" treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"29 1","pages":"413-416"},"PeriodicalIF":0.0000,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films\",\"authors\":\"T. Kobayashi, N. Makimoto, T. Oikawa, A. Wada, H. Funakubo, R. Maeda\",\"doi\":\"10.1109/MEMSYS.2013.6474266\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm2, 20 V, and -42 pm/V by applying AC voltage of 80 V as \\\"wakeup\\\" treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.\",\"PeriodicalId\":92162,\"journal\":{\"name\":\"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)\",\"volume\":\"29 1\",\"pages\":\"413-416\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-03-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2013.6474266\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2013.6474266","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

摘要

我们采用四边形成分Pb(Zr0.3, Ti0.7)O3 (tetrai - pzt)薄膜制备了压电微悬臂梁，并对其在交流驱动条件下的位移-电压行为进行了表征。采用交流电压80 V“唤醒”处理后，薄膜的残余极化、矫顽力电压和压电常数d31分别提高到65.5 μC/Cm2、20 V和-42 pm/V。在-15 V ~ 15 V的交流驱动条件下，采用四压电薄膜制备的压电微悬臂梁成功地表现出了线性位移-电压行为。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films

We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm2, 20 V, and -42 pm/V by applying AC voltage of 80 V as "wakeup" treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

自引率

0.00%

发文量