pzt -环氧复合厚膜的压电和介电性能

Cook-Chennault Ka
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引用次数: 5

摘要

在过去的20年里,铁电薄膜一直受到关注,因为它们可以用于非易失性存储器应用[1-3]、MEMS[4-6]、超声波设备[4,7]、电池分离器[8-10]、生物医学支架[11]和与电池耦合的能量收集设备[12]。由于加工工艺和电学性能不同,压电薄膜的性能不能与相同成分的块状材料直接比较。先前制备压电薄膜的工作包括射频平面磁控溅射[13,14],离子束溅射[15]或直流磁控溅射[16],最近,研究人员已经成功地使用各种化学沉积方法制备薄膜,例如;金属有机化学气相沉积(MOCVD)[1719]、化学溶液沉积[20,21]、金属有机分解(MOD)[22,23]以及脉冲激光沉积(PLD)[24-26]。溶胶-凝胶法具有成分控制、高度均匀、致密、无裂纹薄膜的低温加工和低制造成本等优点[27,28]。这些处理铁电薄膜的方法已被用于生产由锆钛酸铅(PbZrxTi1-xO3也称为PZT)组成的压电陶瓷薄膜,并取得了显著的成功。PZT具有高介电常数、铁电性、压电性和热释电性。PZT理想的性能使其在换能器、传感器和执行器器件中的应用无处不在。然而,这些设备的机械强度差,限制了它们的生命周期和性能。因此,对聚合物陶瓷复合材料的兴趣[29-33](和陶瓷陶瓷[34,35])已经成为一个感兴趣的领域,因为聚合物具有柔性,低成本,易于加工[36,37],并且能够在外电场的影响下极化[38]。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Piezoelectric and Dielectric Properties of PZT-Epoxy Composite Thick Films
Ferroelectric films have been of interest over the last 20 years because of the possibility of using them for non-volatile memory applications [1-3], MEMS [4-6], ultrasonic devices [4,7], battery separators [8-10], biomedical scaffolds [11] and energy harvesting devices where they are coupled with batteries [12]. The properties if piezoelectric films cannot be compared directly with those of bulk materials of the same composition because their processing and electrical properties differ. Previous work on the preparation of piezoelectric films includes RF planar magnetron sputtering [13,14], ion beam sputtering [15] or DC magnetron sputtering [16], where most recently, researchers have succeeded in fabricating films using various chemical methods of deposition such as; metal organic chemical vapor deposition (MOCVD) [1719], chemical solution deposition [20,21], metalorganic decomposition (MOD) [22,23], and also pulsed laser deposition (PLD) [24-26]. The sol-gel method has the benefits of compositional control, reduced temperature processing of highly uniform, dense, crack-free films and low cost of fabrication [27,28]. These methods of processing ferroelectric films have been used with notable success to produce piezoelectric ceramic films comprised of Lead Zirconate Titanate (PbZrxTi1-xO3 also known as, PZT). PZT has a high dielectric constant, ferroelectric, piezoelectric, and pyroelectric properties. The ideal properties of PZT have made its application to transducer, sensor and actuator devices ubiquitous. However, the poor mechanical strength of these devices has limited their life cycle and performance. Therefore, interest in polymer-ceramic [29-33] (and ceramicceramic [34,35]) composites has emerged as an area of interest because polymers are flexible, low cost, easily processed [36,37] and able to be polarized under the influence of an external electric field [38].
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