高温退火对FeSi-=SUB=-x-=/SUB=-体系理化性质的影响

IF 0.9 4区物理与天体物理 Q4 PHYSICS, CONDENSED MATTER

Physics of the Solid State Pub Date : 2023-01-01 DOI:10.21883/pss.2023.03.55594.547

Nikolichev D.E., Kriukov R.N., Zdoroveyshchev A.V., Kuznetsov Yu. M., Zdoroveyshchev D.A., Dudin Yu.A., Dorokhin M. V., Skrylev A.A.

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引用次数: 0

摘要

通过向硅中注入铁离子而形成的硅化铁结构的物理化学性质与随后的高温退火时间有很大关系。不同几何参数的物体在表面形成，粗糙度增大。在Ar气氛中，在1000℃下退火，在前60秒内，Fe-Si化学键的含量下降。随着退火温度的升高，热导率下降的原因是硅化物配合物的形成。关键词:硅化铁，热电，离子注入，化学成分，x射线光电子能谱。

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Effect of High Temperature Annealing on the Physicochemical Properties of systems based on FeSi-=SUB=-x-=/SUB=-

It has been established that the physicochemical properties of structures based on iron silicides formed by ion implantation of iron ions into silicon depend significantly on the time of subsequent high-temperature annealing. Objects with different geometric parameters are formed on the surface and the roughness increases. Annealing at 1000oC in an Ar atmosphere is accompanied by a decrease in the content of the Fe-Si chemical bonds during the first 60 seconds. The reason for the drop in thermal conductivity with increasing annealing temperature is the formation of silicide complexes. Keywords: iron silicide, thermoelectric, ion implantation, chemical composition, X-ray photoelectron spectroscopy.

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来源期刊

Physics of the Solid State 物理-物理：凝聚态物理

CiteScore

1.70

自引率

0.00%

发文量

审稿时长

2-4 weeks

期刊介绍： Presents the latest results from Russia’s leading researchers in condensed matter physics at the Russian Academy of Sciences and other prestigious institutions. Covers all areas of solid state physics including solid state optics, solid state acoustics, electronic and vibrational spectra, phase transitions, ferroelectricity, magnetism, and superconductivity. Also presents review papers on the most important problems in solid state physics.