基于自适应平滑和形态差分技术的超光滑光学表面浅划痕暗场检测方法

IF 3.3 2区物理与天体物理 Q2 OPTICS

Chinese Optics Letters Pub Date : 2017-08-03 DOI:10.3788/COL201715.081202

Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, J. Bai, Yibing Shen, Qiao Xu, H. Jiang, Xu Liu

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引用次数: 13

摘要

超光滑光学表面存在一些浅划痕缺陷。现有技术对其检测效率较低。为此，提出了一种新的检测方法——暗场自适应平滑与形态差分检测(DFD-ASMD)。一方面，在暗场图像中可以保留浅划痕的信息。另一方面，在消除图像中的噪声和背景时，可以分离出它们的弱特征，防止它们被过度削弱。实验表明，浅层划痕的检测率在82%左右，DFD-ASMD可以为高质量光学表面缺陷的质量控制奠定基础。

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Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing

There exist some shallow scratch defects on the super-smooth optical surface. Their detection has a low efficiency with the existing technologies. So a new detection method, dark-field detection of adaptive smoothing and morphological differencing (DFD-ASMD), is proposed. On one hand, the information of shallow scratches can be kept in dark-field images. On the other hand, their weak characteristics can be separated and protected from being overly reduced during the elimination of noise and background in the image. Experiments show the detection rate of shallow scratches is around 82%, and DFD-ASMD can lay a foundation for quality control of defects on the high-quality optical surface.

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来源期刊

Chinese Optics Letters 物理-光学

CiteScore

5.60

自引率

20.00%

发文量

180

审稿时长

2.3 months

期刊介绍： Chinese Optics Letters (COL) is an international journal aimed at the rapid dissemination of latest, important discoveries and inventions in all branches of optical science and technology. It is considered to be one of the most important journals in optics in China. It is collected by The Optical Society (OSA) Publishing Digital Library and also indexed by Science Citation Index (SCI), Engineering Index (EI), etc. COL is distinguished by its short review period (~30 days) and publication period (~100 days). With its debut in January 2003, COL is published monthly by Chinese Laser Press, and distributed by OSA outside of Chinese Mainland.