用于波导的PMMA光子晶体

D. Dragoman, A. Dinescu, R. Muller, C. Kusko, A. Herghelegiu, M. Kusko
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引用次数: 1

摘要

本文介绍了利用电子束光刻技术(EBL),利用正极聚甲基丙烯酸甲酯(PMMA)电子抗蚀剂直接图像化制备二维光子晶体(PCs)的方法。我们设计,制造和模拟了一个被动光学结构:一个通道PC波导,用于集成光学应用。该器件的制造是一个挑战,因为我们将PC波导配置与同一基板上的锥形光波导集成在一起。利用时域有限差分(FDTD)模拟方法预测了所研究结构的光学特性,特别是带隙特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
PMMA photonic crystals for waveguiding applications
This paper describes the fabrication of two- dimensional photonic crystals (PCs) obtained by direct patterning of positive PMMA electronoresist, using the electron-beam lithography technique (EBL). We design, fabricate and simulate a passive optical structure: a channel PC waveguide, to be used in integrated optic applications. The fabrication of the device is a challenge because we integrated the PC waveguide configuration with a taper optical waveguide on the same substrate. The finite difference time domain (FDTD) simulations were used to predict the optical behavior, and in particular the band gap, of the investigated structure.
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