K. Galatsis, Y.X. Li, W. Wlodarski, E. Comini, G. Faglia, G. Sberveglieri
{"title":"RF溅射和溶胶-凝胶法制备MoO/sub - 3/-TiO/sub - 2/薄膜气体传感器","authors":"K. Galatsis, Y.X. Li, W. Wlodarski, E. Comini, G. Faglia, G. Sberveglieri","doi":"10.1109/IMTC.2001.928853","DOIUrl":null,"url":null,"abstract":"MoO/sub 3/-TiO/sub 2/ thin films have been prepared by RF sputtering (RF) and by the sol-gel (SG) method. The films were deposited on alumina and single crystal silicon substrates. SEM characterization has shown the formation of a well-developed crystal stucture for the SG film and a porous morphology for the RF when annealed at 800/spl deg/C. The MoO/sub 3/-TiO/sub 2/ thin films gas sensing properties to NO/sub 2/ and CO has been investigated. The RF and SG fabricated MoO/sub 3/-TiO/sub 2/ possess different gas sensing properties attributed to the fabrication and resulting morphological difference of the thin films. The SG films had a response of 1.75 to 25 ppm of CO and 2.8 to 2 ppm of NO/sub 2/, while the RF films had a response of 1.5 to 30 ppm of CO and a response of 2 to 3 ppm of NO/sub 2/.","PeriodicalId":68878,"journal":{"name":"Journal of Measurement Science and Instrumentation","volume":"53 1","pages":"425-428 vol.1"},"PeriodicalIF":0.0000,"publicationDate":"2001-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"RF sputtered and sol-gel prepared MoO/sub 3/-TiO/sub 2/ thin film gas sensors\",\"authors\":\"K. Galatsis, Y.X. Li, W. Wlodarski, E. Comini, G. Faglia, G. Sberveglieri\",\"doi\":\"10.1109/IMTC.2001.928853\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"MoO/sub 3/-TiO/sub 2/ thin films have been prepared by RF sputtering (RF) and by the sol-gel (SG) method. The films were deposited on alumina and single crystal silicon substrates. SEM characterization has shown the formation of a well-developed crystal stucture for the SG film and a porous morphology for the RF when annealed at 800/spl deg/C. The MoO/sub 3/-TiO/sub 2/ thin films gas sensing properties to NO/sub 2/ and CO has been investigated. The RF and SG fabricated MoO/sub 3/-TiO/sub 2/ possess different gas sensing properties attributed to the fabrication and resulting morphological difference of the thin films. The SG films had a response of 1.75 to 25 ppm of CO and 2.8 to 2 ppm of NO/sub 2/, while the RF films had a response of 1.5 to 30 ppm of CO and a response of 2 to 3 ppm of NO/sub 2/.\",\"PeriodicalId\":68878,\"journal\":{\"name\":\"Journal of Measurement Science and Instrumentation\",\"volume\":\"53 1\",\"pages\":\"425-428 vol.1\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-05-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Measurement Science and Instrumentation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMTC.2001.928853\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Measurement Science and Instrumentation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMTC.2001.928853","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
RF sputtered and sol-gel prepared MoO/sub 3/-TiO/sub 2/ thin film gas sensors
MoO/sub 3/-TiO/sub 2/ thin films have been prepared by RF sputtering (RF) and by the sol-gel (SG) method. The films were deposited on alumina and single crystal silicon substrates. SEM characterization has shown the formation of a well-developed crystal stucture for the SG film and a porous morphology for the RF when annealed at 800/spl deg/C. The MoO/sub 3/-TiO/sub 2/ thin films gas sensing properties to NO/sub 2/ and CO has been investigated. The RF and SG fabricated MoO/sub 3/-TiO/sub 2/ possess different gas sensing properties attributed to the fabrication and resulting morphological difference of the thin films. The SG films had a response of 1.75 to 25 ppm of CO and 2.8 to 2 ppm of NO/sub 2/, while the RF films had a response of 1.5 to 30 ppm of CO and a response of 2 to 3 ppm of NO/sub 2/.
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