分子元件电学表征的纳米间隙器件工程

E. Ore
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引用次数: 0

摘要

对于分子电子学的发展,在不改变其结构的情况下测量单个分子组分的电特性是至关重要的。这项工作涉及工程纳米隙器件,适用于亚10nm分子组分的电学表征。制造过程包括通过分子束外延在两层厚的石墨烯层之间嵌入一层薄薄的石墨烯层,以控制主纳米隙宽度。由沟槽隔开的台地用反应离子束蚀刻成图案。台地侧壁形成了活跃区域,在那里,一些AlAs层被氢氟酸选择性地蚀刻,导致相同的阴影切割。纳米隙器件是通过热蒸发NiCr/Au薄层穿过蚀刻的台面解理而构建的。利用纳米间隙器件对7nm宽的CdSe纳米晶体进行电学表征,观察到负差分电阻行为。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Nanogap Device Engineering for Electrical Characterisation of Molecular Components
For the development of molecular electronics, it is essential to measure the electrical characteristics of individual molecular components -without altering their structures. This -work concerns engineering nanogap devices that are suitable for electrical characterisation of sub-10 nm molecular components. The fabrication process involves embedding a thin layer of AlAs between two thick layers of Gads layers by molecular beam epitaxy that controls the primary nanogap width. Mesas separated by trenches are patterned by reactive ion-beam etching. The mesa sidewallsform the active regions, -where some of the AlAs layer is selectively etched by hydrofluoric acid, resulting in identical shadow cleavages. Nanogap devices are constructed by thermally evaporating thin layers of NiCr/Au crossing the etched mesa cleavages. The nanogap devices are used for electrical characterisation of 7 nm wide CdSe nanocrystals, and negative differential resistance behaviour is observed.
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