{"title":"分子元件电学表征的纳米间隙器件工程","authors":"E. Ore","doi":"10.1109/NEMS50311.2020.9265609","DOIUrl":null,"url":null,"abstract":"For the development of molecular electronics, it is essential to measure the electrical characteristics of individual molecular components -without altering their structures. This -work concerns engineering nanogap devices that are suitable for electrical characterisation of sub-10 nm molecular components. The fabrication process involves embedding a thin layer of AlAs between two thick layers of Gads layers by molecular beam epitaxy that controls the primary nanogap width. Mesas separated by trenches are patterned by reactive ion-beam etching. The mesa sidewallsform the active regions, -where some of the AlAs layer is selectively etched by hydrofluoric acid, resulting in identical shadow cleavages. Nanogap devices are constructed by thermally evaporating thin layers of NiCr/Au crossing the etched mesa cleavages. The nanogap devices are used for electrical characterisation of 7 nm wide CdSe nanocrystals, and negative differential resistance behaviour is observed.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"30 1","pages":"83-88"},"PeriodicalIF":0.0000,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanogap Device Engineering for Electrical Characterisation of Molecular Components\",\"authors\":\"E. Ore\",\"doi\":\"10.1109/NEMS50311.2020.9265609\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"For the development of molecular electronics, it is essential to measure the electrical characteristics of individual molecular components -without altering their structures. This -work concerns engineering nanogap devices that are suitable for electrical characterisation of sub-10 nm molecular components. The fabrication process involves embedding a thin layer of AlAs between two thick layers of Gads layers by molecular beam epitaxy that controls the primary nanogap width. Mesas separated by trenches are patterned by reactive ion-beam etching. The mesa sidewallsform the active regions, -where some of the AlAs layer is selectively etched by hydrofluoric acid, resulting in identical shadow cleavages. Nanogap devices are constructed by thermally evaporating thin layers of NiCr/Au crossing the etched mesa cleavages. The nanogap devices are used for electrical characterisation of 7 nm wide CdSe nanocrystals, and negative differential resistance behaviour is observed.\",\"PeriodicalId\":6787,\"journal\":{\"name\":\"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)\",\"volume\":\"30 1\",\"pages\":\"83-88\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-09-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS50311.2020.9265609\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS50311.2020.9265609","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nanogap Device Engineering for Electrical Characterisation of Molecular Components
For the development of molecular electronics, it is essential to measure the electrical characteristics of individual molecular components -without altering their structures. This -work concerns engineering nanogap devices that are suitable for electrical characterisation of sub-10 nm molecular components. The fabrication process involves embedding a thin layer of AlAs between two thick layers of Gads layers by molecular beam epitaxy that controls the primary nanogap width. Mesas separated by trenches are patterned by reactive ion-beam etching. The mesa sidewallsform the active regions, -where some of the AlAs layer is selectively etched by hydrofluoric acid, resulting in identical shadow cleavages. Nanogap devices are constructed by thermally evaporating thin layers of NiCr/Au crossing the etched mesa cleavages. The nanogap devices are used for electrical characterisation of 7 nm wide CdSe nanocrystals, and negative differential resistance behaviour is observed.